Calculation of layer thickness on rough surface by polyhedral model

Surface and Interface Analysis

Volumn 40, Issue 3-4, 2008, Pages 710-713

  Mohai, M ^a  

^a CHEMICAL RESEARCH CENTER   (Hungary)

Author keywords

Layer thickness; Polyhedron; Quantification; Rough surface; XPS MultiQuant

Indexed keywords

MATHEMATICAL MODELS; X RAY PHOTOELECTRON SPECTROSCOPY;

LAYER THICKNESS; POLYHEDRON; QUANTIFICATION;

SURFACE ROUGHNESS;

EID: 42449143998     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2751     Document Type: Conference Paper

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