Effects of deposition pressure and plasma power on the growth and properties of boron-doped microcrystalline silicon films

Chinese Physics B

Volumn 17, Issue 4, 2008, Pages 1394-1399

  Chen, Yong Sheng ^a,b   Yang, Shi E ^a   Wang, Jian Hua ^c   Lu, Jing Xiao ^a   Gao, Xiao Yong ^a   Gu, Jin Hua ^a   Zheng, Wen ^a   Zhao, Shang Li ^a  

^a ZHENGZHOU UNIVERSITY   (China)

^b INSTITUTE OF PLASMA PHYSICS   (China)

^c WUHAN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Boron doped c Si:H films; Dark conductivity; Raman crystallinity; Thin film solar cells

Indexed keywords

MICROCRYSTALLINE SILICON; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SOLAR CELLS;

DARK CONDUCTIVITY; RAMAN CRYSTALLINITY;

THIN FILM DEVICES;

EID: 42449141465     PISSN: 16741056     EISSN: None     Source Type: Journal    
DOI: 10.1088/1674-1056/17/4/040     Document Type: Article

References (23)

1. Guha S, Yang J, Nath P and Hack M 1986 Appl. Phys. Lett. 49 218
2. Ferreira G M, Chen C, Koval R J, Pearce M J, Wronski C R and Collins R W 2004 J. Non-Cryst. Solids 338-340 694
3. Kondo M, Nasuno Y, Mase H, Wada T and Matsuda A 2002 J. Non-Cryst. Solids 299-302 108
4. Chen H, Gullanar M H and Shen W Z 2004 J. Cryst. Growth 260 91
5. Wu Z M, Lei Q S, Geng X H, Zhao Y, Sun J and Xi J P 2006 Chin. Phys. Soc. 15 1320
6. Lei Q S, Wu Z M, Geng X H, Zhao Y, Sun J and Xi J P 2006 Chin. Phys. Soc. 15 213
7. Wang J L and Wu E X 2007 Chin. Phys. Soc. 16 848
8. Findeisen E, Feidenhans E R, Vigild M E, Clausen K N, Hansen J B, Bentzon M D and Goff J P 1994 J. Appl. Phys. 76 4636
9. Kaneko T, Wakagi M, Onisawa K and Minemura T 1994 Appl. Phys. Lett. 64 1865
10. He Y, Wei Y, Zheng G, Yu M and Liu M 1997 J. Appl. Phys. 82 3408
11. Itabashi N, Nishiwaki N, Magane M, Goto T, Matsuda A, Yamada C and Hirota E 1990 Japan. J. Appl. Phys. 29 585
12. Itabashi N, Nishiwaki N, Magane M, Saito S, Goto T, Matsuda A, Yamada C and Hirota E 1990 Japan. J. Appl. Phys. 29 L505
13. Tachibana K, Mukai T and Harima H 1991 Japan. J. Appl. Phys. 30 L1208
14. Kono A, Koike N, Nomura H and Goto T 1995 Japan. J. Appl. Phys. 34 307
15. Birkholz M, Selle B, Fuhs W, Christiansen S, Strunk H P and Reich R 2001 Phys. Rev. B 64 085402-1
16. Herrero C P, Stutzmann M and Breitschwerdt A 1991 Phys. Rev. B 43 1555
17. Deleo G G and Fowler W B 1985 Phys. Rev. B 31 6861
18. Chang K J and Chadi D J 1998 Phys. Rev. Lett. 60 1422
19. Holleman A F and Wiberg N 1995 Lehrbuch der Anorganischen Chemie 541
20. Mai Y, Klein S, Geng X and Finger F 2004 Appl. Phys. Lett. 85 2839
21. Mai Y, Klein S, Carius R, Wolff J, Lambertz A, Finger F and Geng X 2005 J. Appl. Phys. 97 114913
22. Rath J K, Franken R H J, Gordijn A, Schropp R E I and Goedheer W J 2004 J. Non-Cryst. Solids 338-340 56
23. Amanatides E, Stamou S and Mataras D 2001 J. Appl. Phys. 90 5786