Fabrication of SOI-based nano-gratings for Moiré measurement using focused ion beam

Sensors and Actuators, A: Physical

Volumn 115, Issue 1, 2004, Pages 60-66

  Yan, Dong ^a   Cheng, Jing ^a   Apsel, Apsel ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

Focused ion beam; MEMS; Moir fringe; Nano grating; NEMS; Scanning electron microscope; Silicon on insulator

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; FABRICATION; ION BEAMS; MICROELECTROMECHANICAL DEVICES; MOIRE FRINGES; NANOSTRUCTURED MATERIALS; SCANNING ELECTRON MICROSCOPY; SENSORS;

FOCUSED ION BEAMS; MEMS; NANO-GRATINGS; NEMS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 4243108307     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.03.034     Document Type: Article

References (10)

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