Thermal characterization of dielectric thin films using an improved genetic algorithm

Superlattices and Microstructures

Volumn 35, Issue 3-6, 2004, Pages 239-252

  Popescu, Bogdan ^a   Scudeller, Yves ^a   Brousse, Thierry ^a   Garnier, Bertrand ^a  

^a UNIVERSITÉ DE NANTES   (France)

Author keywords

Contact resistance; Genetic algorithm; Thermal conductivity; Thin film

Indexed keywords

ALUMINA; DIELECTRIC FILMS; GENETIC ALGORITHMS; SILICA; SUBSTRATES; THERMAL CONDUCTIVITY; THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS;

CONTACT RESISTANCE; PHOTOTHERMAL ANALYSIS; THERMAL CONTACT;

THIN FILMS;

EID: 4243055901     PISSN: 07496036     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.spmi.2004.02.023     Document Type: Conference Paper

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