Polycrystalline Si-rich SiSbx bottom heating layer for phase change memory

Electrochemical and Solid-State Letters

Volumn 11, Issue 6, 2008, Pages

  Rao, Feng ^a   Song, Zhitang ^a   Zhang, Ting ^a   Gong, Yuefeng ^a   Wu, Liangcai ^a   Feng, Songlin ^a   Chen, Bomy ^b  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b SILICON STORAGE TECHNOLOGY INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; PHASE CHANGE MEMORY; SILICON; THERMAL CONDUCTIVITY; THIN FILMS;

BOTTOM HEATING LAYER; STOICHIOMETRIC COMPOSITIONS;

POLYCRYSTALLINE MATERIALS;

EID: 42349111054     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2898682     Document Type: Article

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