Formation of Ru nanotubes by atomic layer deposition onto an anodized aluminum oxide template

Electrochemical and Solid-State Letters

Volumn 11, Issue 6, 2008, Pages

  Lee, Do Joong ^a   Yim, Sung Soo ^a   Kim, Ki Su ^a,c   Kim, Soo Hyun ^b,d   Kim, Ki Bum ^a  

^a Seoul National University   (South Korea)

^b Yeungnam University   (South Korea)

^c SAMSUNG Electronics   (South Korea)

^d ELECTROCHEMICAL SOCIETY

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; ATOMIC LAYER DEPOSITION; DENSITY (SPECIFIC GRAVITY); TRANSMISSION ELECTRON MICROSCOPY;

ANODIZED ALUMINUM OXIDE (AAO); CONFORMAL DEPOSITION;

NANOTUBES;

EID: 42349086810     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2901542     Document Type: Article

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