The formation of porous anodic aluminum oxide confined in μm-size contact and trench patterns

Electrochemical and Solid-State Letters

Volumn 9, Issue 12, 2006, Pages 31-33

  Park, Sang Hyun ^a   Lee, Yuwon ^a   Lee, Jin Kyu ^a   Kim, Ki Bum ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; ANODIC OXIDATION; CHEMICAL MECHANICAL POLISHING; DEPOSITION; POROUS MATERIALS; STRESSES; SUBSTRATES;

ANODE ALUMINIUM OXIDE (AAO); POROUS ANODIC ALUMINUM OXIDE; SURFACE UNDULATION;

ALUMINUM COMPOUNDS;

EID: 33750445251     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2360018     Document Type: Article

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