Back-Illuminated three-dimensionally integrated CMOS image sensors for scientific applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6690, Issue , 2007, Pages

  Suntharalingam, Vyshnavi ^a   Rathman, Dennis D ^a   Prigozhin, Gregory ^b   Kissel, Steven ^b   Bautz, Mark ^b  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Active pixel imager; Back illumination; CCD; SOI; Three dimensional integration

Indexed keywords

CMOS INTEGRATED CIRCUITS; DARK CURRENTS; LIGHTING; PHOTODIODES; SILICON ON INSULATOR TECHNOLOGY;

ACTIVE PIXEL IMAGERS; BACK ILLUMINATION; PIXEL ARRAYS; THREE DIMENSIONAL INTEGRATION;

IMAGE SENSORS;

EID: 42249105563     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.739807     Document Type: Conference Paper

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