Recovery of elastic constant of ultrathin Cu films by low temperature annealing

Applied Physics Letters

Volumn 92, Issue 14, 2008, Pages

  Nakamura, N ^a   Ogi, H ^a   Shagawa, T ^a   Hirao, M ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COPPER; DEPOSITION; X RAY DIFFRACTION ANALYSIS;

ACOUSTIC-PHONON RESONANCE SPECTROSCOPY; ELASTIC CONSTANT; LOW TEMPERATURE ANNEALING;

ULTRATHIN FILMS;

EID: 42149183067     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2908039     Document Type: Article

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