Study of elastic anisotropy of Cu thin films by resonant-ultrasound spectroscopy coupled with laser-doppler interferometry and pump-probe photoacoustics

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 5 B, 2006, Pages 4580-4584

  Nakamura, Nobutomo ^a   Ogi, Hirotsugu ^a   Nitta, Hiroki ^a   Tanei, Hiroshi ^a   Fujii, Makoto ^a   Yasui, Takeshi ^a   Hirao, Masahiko ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Cu thin film; Elastic constants; Pump probe photoacoustics; Resonant ultrasound spectroscopy

Indexed keywords

ANISOTROPY; COPPER; ELASTIC MODULI; INTERFEROMETRY; LASER APPLICATIONS; MAGNETRON SPUTTERING; PHOTOACOUSTIC EFFECT; SPECTROSCOPIC ANALYSIS; X RAY DIFFRACTION;

CU THIN FILM; ELASTIC CONSTANTS; PUMP-PROBE PHOTOACOUSTICS; RESONANT-ULTRASOUND SPECTROSCOPY;

THIN FILMS;

EID: 33744472495     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.4580     Document Type: Article

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