Reflective optics for sub-10nm hard X-ray focusing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6705, Issue , 2007, Pages

  Mimura, H ^a   Matsuyama, S ^a   Yumoto, H ^a   Handa, S ^a   Kimura, T ^a   Sano, Y ^a   Tamasaku, K ^b   Nishino, Y ^b   Yabashi, M ^c   Ishikawa, T ^b,c   Yamauchi, K ^a  

^a OSAKA UNIVERSITY   (Japan)

^b JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE   (Japan)

^c SPring 8/RIKEN ^*  (Japan)

Author keywords

Coherent hard X ray; EEM; Hard X ray focusing; MSI; Multilayer mirror; RADSI

Indexed keywords

FOCUSED ION BEAMS; FOCUSING; MIRRORS; MULTILAYERS; SENSITIVITY ANALYSIS; X RAY SPECTROSCOPY;

COHERENT HARD X-RAYS; MULTILAYER MIRRORS; SPATIAL RESOLUTION; X-RAY SCATTERING;

X RAY OPTICS;

EID: 42149181396     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.734752     Document Type: Conference Paper

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