The study of CD error in mid-local pattern area caused by develop loading effect

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6730, Issue , 2007, Pages

  Kang, Man Kyu ^a   Lee, Jung Hun ^a   Kim, Seong Yoon ^a   Kim, Byung Gook ^a   Woo, Sang Gyun ^a   Cho, Han Ku ^a  

^a SAMSUNG Electronics   (South Korea)

Author keywords

CD uniformity; Chemical flare; Develop loading; Dissolution product

Indexed keywords

CHIP SCALE PACKAGES; DISSOLUTION; ELECTRON BEAMS; ERROR CORRECTION;

CHEMICAL FLARE; CRITICAL DIMENSION UNIFORMITY; DEVELOP LOADING; DISSOLUTION PRODUCT;

ELECTRON DEVICE MANUFACTURE;

EID: 42149156254     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.746565     Document Type: Conference Paper

References (6)

1. H. Han, S. Moon, J. Yoon, B. Kim, S. Choi, and W. Han, "Quantitative analysis of develop loading effect and its application", Proceedings of SPIE, Wolfgang Staud, J. Tracy Weed, Vol. 5567, 213-219, SPIE (2004)
2. D. Sullivan, Y. Okawa, K. Sugawara, Z. Benes, J. Kotani, "Chemical flare long range proximity effects in photomask manufacturing with chemically amplified resists", Proceedings of SPIE Vol. 6349, SPIE (2006)
3. G. Lee, C. Berger, C. Burgel, A. Feicke, R. Cantrell, M. Tschinkl, "Application of a wafer development process to mask making", Proceedings of SPIE, Masanori Komuro, Vol. 5853, 445-453 (2005)
4. K. Ooishi, Y. Esaki, K. Sakamoto, H. Sakurai, M. Itoh, M. Nakao, T. Nishimura, H. Miyashita, N. Hayashi, S. Tanabe, Y. Oosaki, Y. Sasagawa, "New Development Method eliminating the loading and micro-loading effect", Proceedings of SPIE, Hiroyosho Tanabe, Vol. 5130, 67-77, SPIE (2003)
5. H. Sakurai, Y. Oppata, K. Murano, M. Sakai, M. Itoh, H. Watanabe, H. Funakoshi, K. Ooishi, Y. Okamoto, M. Kaneda, S. Kamei, N. Hayashi, Proceedings of SPIE, Vol. 6349, 6394J (2006)
6. D. Courboin, J.W. Choi, S.H. Jung, S.H. Baek, L.J. Kim, C.N. Ahn, H.S. Kim, "Investigations on microloading effect : A parallel approach to PGSD (Proximity Gap Suction Development)", SPIE Vol. 5446, 106-114 (2004)