Microstructure of 100 nm damascene copper overburden and lines

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6648, Issue , 2007, Pages

  Geiss, R H ^a   Read, D T ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Copper; Damascene; Grain size; Preferred orientation; Texture; Twinning

Indexed keywords

DAMASCENE; INTERCONNECT SYSTEMS; METALLIC CONDUCTORS; PREFERRED ORIENTATION;

CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; GRAIN SIZE AND SHAPE; TEXTURES; TWINNING;

OPTICAL INTERCONNECTS;

EID: 42149129069     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.735021     Document Type: Conference Paper

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