Performance comparison of techniques for intra-field CD control improvement

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6730, Issue , 2007, Pages

  Pforr, Rainer ^d   Hennig, Mario ^a   Reichelt, Jens ^a   Zvi, Guy Ben ^b   Sczyrba, Martin ^c  

^a QIMONDA DRESDEN GMBH AND CO OHG   (Germany)

^b Pixer Technology   (Israel)

^c AMTC   (Germany)

^d NONE

Author keywords

AIMS; CD control; CDC; DoseMapper; Femto laser; IF CDU; Photomask; Shading elements

Indexed keywords

ERROR ANALYSIS; PHOTOMASKS;

DATA INPUT; SHADING ELEMENTS;

ULTRASHORT PULSES;

EID: 42149109038     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.746695     Document Type: Conference Paper

References (10)

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7. th Bacus Conference, Monterey, 2007
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10. th Bacus Conference, Monterey 2007