Reaction of iron with amorphous silicon and crystalline silicon for the fabrication of iron silicides

Defect and Diffusion Forum

Volumn 272, Issue , 2007, Pages 99-106

  Gong, Daoren ^a   Li, Dongsheng ^a   Yuan, Zhizhong ^a   Yang, Deren ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Amorphous silicon; Diffusion; Iron suicides; Single crystal silicon

Indexed keywords

AMORPHOUS SILICON; CRYSTALLINE MATERIALS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; IRON COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

CRYSTALLINE SILICON; IRON SILICIDES;

SILICIDES;

EID: 42149106142     PISSN: 10120386     EISSN: 16629507     Source Type: Journal    
DOI: 10.4028/3-908451-54-X.99     Document Type: Article

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