Effects of sapphire substrates surface treatment on the ZnO thin films grown by magnetron sputtering

Physica B: Condensed Matter

Volumn 403, Issue 12, 2008, Pages 1979-1982

  Wang, Yinzhen ^a   Chu, Benli ^a  

^a SOUTH CHINA NORMAL UNIVERSITY   (China)

Author keywords

Magnetron sputtering; Sapphire substrate; Surface treatment; ZnO thin films

Indexed keywords

ATOMIC FORCE MICROSCOPY; MAGNETRON SPUTTERING; SAPPHIRE; SURFACE TREATMENT; ZINC OXIDE;

SAPPHIRE SUBSTRATE; ZNO THIN FILMS;

THIN FILMS;

EID: 41949090144     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physb.2007.11.003     Document Type: Article

References (14)

1. Lee J.B., Kim H.J., Kim S.G., Hwang C.S., Hong S.-H., Shin Y.H., and Lee N.H. Thin Solid Films 435 (2003) 179
2. Goux A., Pauporte T., Chivot J., and Lincot D. Electrochim. Acta 50 (2005) 2239
3. Clarke D.R. J. Am. Ceram. Soc. 82 (1999) 485
4. Serice R.F. Science 276 (1997) 895
5. Narayan J., Dovidenko K., Sharma A.K., and Oktyabrsky S. J. Appl. Phys. 84 (1998) 2597
6. Mohamed G.A., Mohamed E.-M., and El-Fadl A.A. Physica B 308-310 (2001) 949
7. Zhang B.P., Wakatsuki K., Binh N.T., Usami N., and Segawa Y. Thin Solid Films 449 (2004) 12
8. Sayago I., Aleixandre M., Ares L., Fernandez M.J., Santos J.P., Gutierrez J., and Horrillo M.C. Appl. Surf. Sci. 245 (2005) 273
9. Shan F.K., Shin B.C., Jang S.W., and Yu Y.S. J. Eur. Ceram. Soc. 24 (2004) 1015
10. Shan F.K., Liu G.X., Lee W.J., Lee G.H., Kim I.S., Shin B.C., and Kim Y.C. J. Cryst. Growth 277 (2005) 284
11. Riad A.S., Mahmoud S.A., and Ibrahim A.A. Physica B 296 (2001) 319
12. Kim J.H., Choi S.C., Choi J.Y., Kim K.S., Yan G.M., Hong C.H., Lim K.Y., and Lee H.J. Jpn. J. Appl. Phys. 38 (1999) 2721
13. Heinlein C., Grepstad J., Riechert H., and Averbeck R. Mater. Sci. Eng. B 43 (1997) 253
14. Chen Y., Bagnall D.M., Koh H.J., Park K.T., Hiraga K., Zhu Z.Q., and Yao T. J. Appl. Phys. 84 (1998) 3912