A microelectromechanical accelerometer fabricated using printed circuit processing techniques

Journal of Micromechanics and Microengineering

Volumn 18, Issue 1, 2008, Pages

  Rogers, J E ^a   Ramadoss, R ^a   Ozmun, P M ^a   Dean, R N ^a  

^a AUBURN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; MEMS; MICROFABRICATION; NATURAL FREQUENCIES; POLYIMIDES; POLYTETRAFLUOROETHYLENES; PRINTED CIRCUIT BOARDS;

CIRCUIT PROCESSING; PROOF MASS; SENSING ELECTRODES; SUSPENSION BEAMS;

ACCELEROMETERS;

EID: 41849151429     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/1/015013     Document Type: Article

References (17)

1. Senturia S D 2001 Microsystem Design (Dordrecht: Kluwer)
2. Kovacs T A 1998 Micromachined Transducers Sourcebook (New York: McGraw-Hill)
3. Nguyen C T 1999 Frequency-selective MEMS for miniaturized low-power communication devices IEEE Trans. Microw. Theor. Tech. 47 1486-503
4. Ramadoss R, Lee S, Lee Y C, Bright V M and Gupta K C 2006 RF MEMS capacitive switches fabricated using printed circuit processing techniques IEEE/ASME J. Microelectromech. Syst. 15 1595-604
5. Wego A, Richter S and Pagel L 2001 Fluidic microsystems based on printed circuit board technology J. Micromech. Microeng. 11 528-31
6. Cabuz C, Herb W R, Cabuz E I and Lu S T 2001 The dual diaphragm pump MEMS 2001: Proc. 14th IEEE Int. Conf. Micro Electro Mechanical Systems pp 519-22
7. Nguyen N T and Huang X Y 2001 Miniature valveless pumps based on printed circuit board technique Sensors Actuators 88 104-11
8. Lian K, O'Rourke S, Eliacin M, Gamboa C, Terbrueggen R, Sadler D and Chason M 2002 Development of MEMS on printed wiring board platform IMAPS: Proc. Int. Microelectron. Packag. Soc. Workshop on Packag. MEMS and Related Micro Integr./Nano Syst.
9. Wang X, Engel J and Liu C 2003 Liquid crystal polymer (LCP) for MEMS: processes and applications J. Micromech. Microeng. 13 628-33
10. Palasagaram J N and Ramadoss R 2006 MEMS capacitive pressure sensor fabricated using printed circuit processing techniques IEEE Sensors J. 6 1374-5
11. Broadbent H A, Ivanov S Z and Fries D P 2007 Fabrication of a LCP-based conductivity cell and resistive temperature device via PCB MEMS technology J. Micromech. Microeng. 17 722-9
12. Jackson R and Ramadoss R 2007 A MEMS-based electrostatically tunable circular microstrip patch antenna J. Micromech. Microeng. 17 1-8
13. Bao M-H 2000 Handbook of Sensors and Actuators vol 8 (Amsterdam: Elsevier Science)
14. Varadan V K 2003 Polymer-based MEMS accelerometer with modified organic electronics and thin film transistor Proc. SPIE 5116 149-59
15. Rogers J E, Ramadoss R, Ozmun P M and Dean R N 2007 MEMS accelerometer fabricated using printed circuit processing techniques ISIE'07: Proc. 2007 IEEE Int. Symp. on Industrial Electronics
16. Soderkvist J 1983 Similarities between piezoelectric thermal and other internal means of exciting vibrations J. Micromech. Microeng. 3 24-31
17. Kapton E-High Modulus Polyimide Film Data Sheet (Circleville, OH: DuPont High Performance Materials) (http://www.dupont.com/kapton)