RF-MEMS capacitive switches fabricated using printed circuit processing techniques

Journal of Microelectromechanical Systems

Volumn 15, Issue 6, 2006, Pages 1595-1604

  Ramadoss, Ramesh ^a   Lee, Simone ^b   Lee, Y C ^c   Bright, V M ^c   Gupta, K C ^c  

^a AUBURN UNIVERSITY   (United States)

^b FORMFACTOR INC   (United States)

^c UNIVERSITY OF COLORADO   (United States)

Author keywords

Coplanar waveguide (CPW) Shunt switch; Kapton E Polyimide film; Printed circuit; Printed circuit board microelectromechanical systems (PCB MEMS); Printed wiring board microelectromechanical systems (PWB MEMS); Radio frequency microelectromechanical systems (RF MEMS) switches

Indexed keywords

CAPACITANCE; ELECTRODES; FILMS; PRINTED CIRCUIT BOARDS; SWITCHES; WAVEGUIDES;

CAPACITIVE SWITCHES; RADIO FREQUENCY MICROELECTROMECHANICAL SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 33845525764     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.885854     Document Type: Article

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