Production equipment for large area deposition of amorphous and microcrystalline silicon thin-film solar cells

Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4

Volumn 2, Issue , 2006, Pages 1724-1727

  Repmann, T ^a   Wieder, S ^a   Klein, S ^a   Stiebig, H ^b   Rech, B ^b  

^a Applied Films GmbH and Co KG   (Germany)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MICROCRYSTALLINE SILICON; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILM DEVICES;

MICROCRYSTALLINE SILICON SOLAR CELLS; SILICON BOTTOM CELLS;

SILICON SOLAR CELLS;

EID: 41749098803     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/WCPEC.2006.279824     Document Type: Conference Paper

References (16)

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