Intrinsic stress evolution in nanocrystalline diamond thin films with deposition temperature

Applied Physics Letters

Volumn 92, Issue 13, 2008, Pages

  Xiao, X ^a   Sheldon, B W ^b   Qi, Y ^a   Kothari, A K ^b  

^a GENERAL MOTORS CORPORATION   (United States)

^b Brown University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE STRESS; DEPOSITION; GRAIN BOUNDARIES; NANOCRYSTALLINE MATERIALS; SEMICONDUCTING DIAMONDS; TEMPERATURE CONTROL; THIN FILMS;

DEPOSITION TEMPERATURE; INTRINSIC STRESSES; STRESS EVOLUTION;

TENSILE STRESS;

EID: 41649118948     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2906903     Document Type: Article

References (17)

1. V. Chakrapani, J. C. Angus, A. B. Anderson, S. D. Wolter, B. R. Stoner, and G. U. Sumanasekera, Science 318, 1424 (2007).
2. X. Xiao, J. Wang, C. Liu, J. A. Carlisle, M. Mech, R. Greenberg, D. Guven, R. Freda, M. S. Humayun, J. Weiland, and O. Auciello, J. Biomed. Mater. Res., Part B: Appl. Biomater. 77B, 273 (2006).
3. J. Carlisle, Nat. Mater. 3, 668 (2004).
4. J. P. Sullivan, T. A. Friedmann, and K. Hjort, MRS Bull. 24, 309 (2001).
5. B. W. Sheldon, A. Rajamani, A. Bhandari, E. Chason, S. K. Hong, and R. Bereford, J. Appl. Phys. 98, 043509 (2005).
6. S. Proffitt, C. Thompson, A. Gutierrez, N. Paris, N. K. Singh, R. B. Jackman, and J. S. Foord, Diamond Relat. Mater. 9, 246 (2000).
7. I. Schmidt and C. Benndorf, Diamond Relat. Mater. 10, 347 (2001).
8. X. Xiao, J. Birrell, J. Gerbi, O. Auciello, and J. A. Carlisle, J. Appl. Phys. 96, 2232 (2004).
9. H. Li, B. W. Sheldon, A. Kothari, Z. Ban, and B. L. Walden, J. Appl. Phys. 100, 094309 (2006).
10. A. Ferrari and J. Robertson, Phys. Rev. B 61, 14095 (2000).
11. J. Asmussen and D. K. Reinhard, Diamond Films Handbook (Marcel Dekker, New York, 2002).
12. W. D. Nix and B. M. Clemens, J. Mater. Res. 14, 3467 (1999).
13. B. W. Sheldon, A. Bhandari, A. F. Bower, S. Raghavan, X. Weng, and J. M. Redwing, Acta Mater. 55, 4973 (2007).
14. J. A. Floro, S. J. Hearne, J. A. Hunter, P. Kotula, E. Chason, S. C. Seel, and C. V. Thompson, J. Appl. Phys. 89, 4886 (2001).
15. E. Chason, B. W. Sheldon, L. B. Freund, J. A. Floro, and S. J. Hearne, Phys. Rev. Lett. 88, 156103 (2002).
16. F. A. Doljack and R. W. Hoffman, Thin Solid Films 12, 71 (1972).
17. Y. Qi and L. G. Hector, Jr., Phys. Rev. B 69, 235401 (2004).