Digital Pattern Generator for polynomially bordered shape primitives

Microelectronic Engineering

Volumn 35, Issue 1-4, 1997, Pages 465-468

  Strahle S ^a   Schock, K D ^a   Prins, F E ^a   Kern, D P ^a  

^a UNIVERSITY OF TÜBINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DATA HANDLING; DIGITAL DEVICES; GEOMETRY; INTERFACES (COMPUTER); LOGIC CIRCUITS; SIGNAL GENERATORS;

BORDERED SHAPE PRIMITIVES; DEFLECTION SIGNALS; DIGITAL PATTERN GENERATOR; HARD WIRED LOGIC; OFFLINE SPLINE INTERPOLATION PROGRAM;

ELECTRON BEAM LITHOGRAPHY;

EID: 0031073150     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(96)00184-0     Document Type: Article

References (2)

1. Erik H. Anderson, Volker Boegli and Lawrence Muray, J. Vac. Sci. Technol. B 13, 2529 (1995)
2. F. Vasey, D. Prongúê, H. Rothuizen, P. Vettiger, J. Vac. Sci. Technol. B 12, 3460 (1994)