SCOPUS 정보 검색 플랫폼

2004 International Conference on Integrated Circuit Design and Technology, ICICDT

Volumn , Issue , 2004, Pages 105-111

Advanced SOI substrate manufacturing

(4) Mazure C a Celler, G K a Maleville, C a Cayrefourcq, I a

a PARC TECHNOLOGIQUE DES FONTAINES (France)

Author keywords

[No Author keywords available]

Indexed keywords

AGGLOMERATION; CMOS INTEGRATED CIRCUITS; ION IMPLANTATION; NETWORKS (CIRCUITS); SILICON ALLOYS; SUBSTRATES; SURFACE ROUGHNESS; THIN FILMS; WSI CIRCUITS;

BURIED OXIDE (BOX); IMPLANTATION ENERGY; SILICON SUBSTRATES; SILICON-ON-INSULATOR (SOI);

SILICON WAFERS;

EID: 4143125584 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (4)

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