Pre-compensated excitation waveform to suppress second harmonic generation in MEMS electrostatic transducers

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2003, Pages 477-480

  Zhou, Shiwei ^a   Reynolds, Paul ^b   Hossack, John ^a  

^a University of Virginia   (United States)

^b WEIDLINGER ASSOCIATES INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITOR PLATES; ELECTROSTATIC TRANSDUCERS; HARMONIC IMAGING;

COMPUTER SIMULATION; ELECTRIC POTENTIAL; ELECTROSTATICS; FINITE ELEMENT METHOD; HARMONIC GENERATION; TISSUE; TRANSDUCERS; WAVEFORM ANALYSIS;

MICROELECTROMECHANICAL DEVICES;

EID: 4143113643     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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