Palladium enhanced etching of n-type silicon in hydrofluoric acid solution

Electrochemistry

Volumn 76, Issue 2, 2008, Pages 144-146

  Yae, Shinji ^a,b   Abe, Makoto ^a   Fukumuro, Naoki ^a   Matsuda, Hitoshi ^a  

^a UNIVERSITY OF HYOGO   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

Galvanic etching; Metal particle enhanced HF etching; Photoelectrochemical solar cell; Porous silicon

Indexed keywords

CHEMICAL MODIFICATION; DISSOLVED OXYGEN; ETCHING; POROUS SILICON; SOLAR CELLS;

GALVANIC ETCHING; METAL-PARTICLE-ENHANCED HF ETCHING; PHOTOELECTROCHEMICAL SOLAR CELLS;

PALLADIUM;

EID: 41349114406     PISSN: 13443542     EISSN: None     Source Type: Journal    
DOI: 10.5796/electrochemistry.76.144     Document Type: Article

References (11)

1. K. W. Kolasinski, Current Opinion in Solid State & Materials Science, 9, 73 (2005).
2. X. Li and P. W. Bohn, Appl. Phys. Lett., 11, 2572 (2000).
3. K. Peng, Y. Yan, S. Gao, and J. Zhu, Adv. Funct. Mater., 13, 127 (2003).
4. K. Tsujino and M. Matsumura, Electrochem. Solid-State Lett., 8, C193 (2005).
5. K. Tsujino, M. Matsumura, and Y. Nishimoto, Sol. Energy Mater. Sol. Cells, 90, 100 (2006).
6. H. Asoh, F. Arai, and S. Ono, Electrochem. Comm., 9, 535 (2007).
7. S. Yae, Y. Kawamoto, H. Tanaka, N. Fukumuro, and H. Matsuda, Electrochem. Comm., 5, 632 (2003).
8. S. Yae, H. Tanaka, T. Kobayashi, N. Fukumuro, and H. Matsuda, Phys. Stat. Sol. (c), 2, 3476 (2005).
9. S. Yae, T. Kobayashi, T. Kawagishi, N. Fukumuro, and H. Matsuda, Solar Energy, 80, 701 (2006).
10. S. Yae, T. Kobayashi, T. Kawagishi, N. Fukumuro, and H. Matsuda, ECS Proceedings Vol., 2004-19, 141 (2006).
11. S. Yae, M. Abe, T. Kawagishi, K. Suzuki, N. Fukumuro, and H. Matsuda, Trans. Mater. Res. Soc. Jpn., 32, 445 (2007).