Structural change in porous Si by photoillumination during metal particle enhanced etching

Proceedings - Electrochemical Society

Volumn PV 2004-19, Issue , 2006, Pages 141-146

  Yae, Shinji ^a,b   Kobayashi, Tsutomu ^a   Kawagishi, Tatsunori ^a   Fukumuro, Naoki ^a   Matsuda, Hitoshi ^a  

^a UNIVERSITY OF HYOGO   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; BEHAVIORAL RESEARCH; ETCHING; IRRADIATION; LUMINESCENT DEVICES; OXIDATION; SILICON;

MACROPOROUS; PHOTOILLUMINATION; PHOTOIRRADIATION;

POROUS MATERIALS;

EID: 33745957418     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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