Structural and electrical properties of Au and Ti/Au contacts to n-type GaN

Vacuum

Volumn 82, Issue 8, 2008, Pages 794-798

  Dobos, L ^a   Pecz B ^a   Toth L ^a   Horvath Zs J ^a   Horvath Z E ^a   Beaumont, B ^b   Bougrioua, Z ^c  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b LUMILOG   (France)

^c CRHEA CNRS   (France)

Author keywords

Electrical properties; Electron microscopy; GaN; Solid phase reaction; Thin films

Indexed keywords

DEPOSITION; ELECTRIC PROPERTIES; ELECTRON MICROSCOPY; GALLIUM NITRIDE; THIN FILMS; TITANIUM;

GOLD DIFFUSION; SOLID PHASE REACTION;

GOLD;

EID: 41249092071     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.11.005     Document Type: Article

References (19)

1. Fan Z.F., Mohammad S.N., Kim W., Aktas O., Botchkarev A.E., and Morkoç M. Appl Phys Lett 68 (1996) 1672-1674
2. Ruvimov S., Liliental-Weber Z., Washburn J., Duxstad K.J., Haller E.E., Fan Z.F., et al. Appl Phys Lett 69 (1996) 1556-1558
3. Luther B.P., S. Mohney S.E., Jackson T.N., Asif Khan M., Chen Q., and Yang J.W. Appl Phys Lett 70 (1997) 57-59
4. Foresi J.S., and Moustakas T.D. Appl Phys Lett 62 (1993) 2859-2861
5. Motayed A., Jones K.A., Derenge M.A., Wood M.C., Zakharov D.N., Liliental-Weber Z., et al. J Appl Phys 95 (2004) 1516-1524
6. Frayssinet E., Beaumont B., Faurie J.P., Gibart P., Makkai Zs., Pécz B., et al. MRS Internet J Nitride Semicond 7 (2002) (Art. No. 8)
7. Cheung S.K., and Cheung N.W. Appl Phys Lett 49 (1986) 85-87
8. Liu Y., Kauser M.Z., Nathan M.I., Ruden P.P., Dogan S., and Morkoç H. Appl Phys Lett 84 (2004) 2112-2114
9. Osvald J. Solid-State Electron 48 (2004) 2347-2349
10. Horváth Zs.J., Ádám M., Szabó I., Serényi M., and Tuyen V.V. Appl Surf Sci 190 (2002) 441-444
11. Barna A., Pécz B., and Radnóczi G. Handbook of microscopy vol. 3 (1997) 751
12. Sze S.M. The physics of semiconductor devices (1981), Wiley, New York Comment: [p. 247]
13. Michaelson H.B. IBM J Res Develop 22 (1978) 72-80
14. Foresi J.S., and Moustakas T.D. Appl Phys Lett 62 (1993) 2859-2861
15. Horváth Zs.J. Solid-State Electron 39 (1996) 176-178 [references therein]
16. Padovani F.A., and Stratton R. Solid-State Electron 9 (1966) 695-707
17. Hashizume T., Kotani J., and Hasegawa H. Appl Phys Lett 84 (2004) 4884-4886
18. Osvald J. Appl Surf Sci 1 (2008) [preprint, and references therein]
19. Changzi L., Hongnai C., Xiaoliang L., Xuesong X., and S. Noor M. J Appl Phys 91 (2002) 9218-9224