Germanium resistors for RF MEMS based microsystems

Microsystem Technologies

Volumn 14, Issue 4-5, 2008, Pages 601-606

  Grenier, K ^a   Bordas, C ^a   Pinaud, S ^a   Salvagnac, L ^a   Dubuc, D ^a  

^a UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETISM; GERMANIUM COMPOUNDS; MEMS; MICROSYSTEMS;

GERMANIUM RESISTORS; INTEGRATED RESISTORS;

RESISTORS;

EID: 41149155957     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0448-4     Document Type: Conference Paper

References (16)

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