Polymer based technologies for microwave and millimeterwave applications

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2004, Pages 545-548

  Grenier, K ^a   Dubuc, D ^a   Mazenq, L ^a   Busquere J P ^b   Ducarouge, B ^a   Bouchriha, F ^a   Rennane, A ^a   Lubecke, V ^c   Pons, P ^a   Ancey, P ^b   Plana, R ^a  

^a LAAS CNRS   (France)

^b STMICROELECTRONICS   (France)

^c UNIVERSITY OF HAWAII   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FLUIDICS; FREQUENCIES; INTEGRATED CIRCUIT LAYOUT; MICROELECTROMECHANICAL DEVICES; MILLIMETER WAVE DEVICES; POLYMERS; SUBSTRATES;

INTELLIGENT MODULES; MICROELECTRONIC EQUIPMENT; MILLIMETER WAVE APPLICATIONS; RECONFIGURABILITY;

MICROWAVES; MILLIMETER WAVES;

CIRCUIT LOSS; ELECTRICAL CHARACTERISTIC; HIGH FREQUENCY CIRCUITS; MECHANICAL CHARACTERISTICS; MICROWAVE AND MILLIMETERWAVE; MICROWAVE APPLICATIONS; MILLIMETER-WAVE APPLICATIONS; MINIMISATION; POLYMER BASED; THERMAL CHARACTERISTICS;

EID: 21644473394     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. Arch Chemicals data sheet on Durimides 7500
2. Dow Chemicals Company data sheet on Cyclotenes
3. Dupont data sheet onPI2611
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5. J. Papapolymerou & al., "Microwave filters on a low resistivity Si substrate with a polyimide interface layer for wireless circuits", Microwave Symposium Digest, 2001 IEEE MTT-S International, Phoenix, USA, June 2001
6. K. Grenier & al., "Minimization of passive circuits losses realized on low resistivity silicon using micromachining techniques and thick polymer layers", Microwave Symposium Digest, 2003 IEEE MTT-S International, Philadelphia, USA, June 2003
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8. E. Ojefors& al., "24GHz ISM-band antennas on surface microsmachined substrates for integration with a commercial SiGe process", European Microwave Week, Munich, Germany, Oct. 2003
9. JP. Busquere & al., "Development of a reconfigurable in frequency LNA through RF MEMS", 2004 IEEE MEMSWAVE Workshop, Uppsala, Sweden, July 2004