Foot (bottom corner) measurement of a structure with SPM

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4344, Issue 1, 2001, Pages 733-738

  Meyyappan, A ^b   Klos, M ^c   Muckenhirn, S ^c  

^a RAVE LLC   (United States)

^b Surface/Interface Inc   (United States)

^c NONE

Author keywords

Foot; Probe; Scanning probe microscope (SPM); Surface roughness

Indexed keywords

ALGORITHMS; ATOMIC FORCE MICROSCOPY; PRODUCTION CONTROL; SCANNING; SURFACE ROUGHNESS;

SCANNING PROBE MICROSCOPES (SPM);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034763363     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.436801     Document Type: Article

References (5)