The influence of thiourea on copper electrodeposition: Adsorbate identification and effect on electrochemical nucleation

Thin Solid Films

Volumn 516, Issue 12, 2008, Pages 3761-3766

  Kang, Moo Seong ^a   Kim, Soo Kil ^b   Kim, Keeho ^c   Kim, Jae Jeong ^a  

^a Seoul National University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

^c DongbuAnam Semiconductor ^*  (South Korea)

Author keywords

Brightener; Copper; Copper sulfide; Electrodeposition; Nucleation; Thiourea

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; ELECTRODEPOSITION; ELECTROLYTES; NUCLEATION; X RAY PHOTOELECTRON SPECTROSCOPY;

COPPER SULFIDE; ELECTROCHEMICAL NUCLEATION;

COPPER;

EID: 40849118523     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.06.069     Document Type: Article

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