Use of boron heavily doped silicon slabs for gas sensors based on free-standing membranes

Sensors and Actuators, B: Chemical

Volumn 130, Issue 1, 2008, Pages 538-545

  Fonseca, L ^a   Santander, J ^a   Rubio, R ^a   Sabate N ^a   Figueras, E ^a   Duch, M ^a   Gracia I ^a   Cane C ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

Gas sensing; Infrared absorbers; Microhotplates; Thermal spreaders; Thermopiles

Indexed keywords

BORON; CHEMICAL SENSORS; DOPING (ADDITIVES); INFRARED ABSORPTION; THERMOPILES;

FREE-STANDING MEMBRANES; SILICON SLABS;

SEMICONDUCTING SILICON;

EID: 40749162811     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.09.081     Document Type: Article

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