AFM thermal imaging as an optimization tool for a bulk micromachined thermopile

Sensors and Actuators, A: Physical

Volumn 115, Issue 2-3 SPEC. ISS., 2004, Pages 440-446

  Fonseca, L ^a   Perez Murano F ^a   Calaza, C ^b   Rubio, R ^a   Santander, J ^a   Figueras, E ^a   Gracia I ^a   Cane C ^a   Moreno, M ^b   Marco, S ^b  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b UNIVERSITY OF BARCELONA   (Spain)

Author keywords

AFM; Thermal measurements; Thermopile

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; INFRARED IMAGING; INFRARED RADIATION; OPTIMIZATION; THERMAL EFFECTS; THERMOPILES;

JOULE DISSIPATION; MICROMACHINED THERMOPILES; THERMAL PROBING TECHNIQUES; THERMOELECTRICAL RESPONSE;

MICROMACHINING;

EID: 4544310159     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.04.054     Document Type: Conference Paper

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