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Volumn 454, Issue 1-2, 2008, Pages 102-105

Fabrication and optical constants of amorphous copper nitride thin films prepared by ion beam assisted dc magnetron reactive sputtering

Author keywords

Amorphous materials; Nitride materials; Optical properties; X ray diffraction

Indexed keywords

AMORPHOUS FILMS; COPPER COMPOUNDS; MAGNETRON SPUTTERING; NITRIDES; OPTICAL CONSTANTS; REACTIVE SPUTTERING; X RAY DIFFRACTION;

EID: 40749157531     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2006.12.020     Document Type: Article
Times cited : (25)

References (27)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.