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Volumn 8, Issue 8-9, 1999, Pages 1715-1719

Cu3N films prepared by the low-pressure r.f. supersonic plasma jet reactor: Structure and optical properties

(9) Fendrych, F a Soukup, L a Jastrabik L a Sicha M a,b Hubicka Z a,b Chvostova D a Tarasenko, A a Studnicka V a Wagner, T c

a INSTITUTE OF PHYSICS (Czech Republic)

b CHARLES UNIVERSITY (Czech Republic)

c Laser Optik Technologie ORIEL (Germany)

Author keywords

Copper nitride; Optical properties; Plasma chemical deposition; Structure

Indexed keywords

ELASTIC MODULI; ENERGY GAP; FILM GROWTH; FILM PREPARATION; MICROHARDNESS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA JETS; STOICHIOMETRY; STRUCTURE (COMPOSITION); SURFACE TREATMENT; THIN FILMS;

COPPER NITRIDE; SUPERSONIC PLASMA JET REACTOR;

NITRIDES;

EID: 0032594137 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/s0925-9635(99)00063-1 Document Type: Article

Times cited : (40)

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