Fabrication of PZT sol gel composite ultrasonic transducers using batch fabrication micromolding

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 53, Issue 9, 2006, Pages 1679-1684

  Pang, Guofeng ^b   Sayer, Michael ^b   Lockwood, Geoffrey R ^a,b   Watt, Michael ^a,c  

^a IEEE

^b QUEEN S UNIVERSITY   (Canada)

^c Gennum Corporation   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; EPOXY RESINS; MICROELECTRONICS; NICKEL PLATING; SOL-GELS;

ANNULAR ARRAY STRUCTURES; LINEAR ARRAY ELEMENTS; LITHOGRAPHIC GALVANFORMING AND ABFORMING (LIGA); MICROMOLDING;

ULTRASONIC TRANSDUCERS;

EID: 33748338564     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2006.1678196     Document Type: Article

References (18)

1. S. W. Smith, G. E. Trahey, and O. T. von Ramm, "Two-dimensional arrays for medical ultrasound," Ultrason. Imag., vol. 14, pp. 213-219, 1992.
2. B. A. J. Angelsen, H. Torp, S. Holm, K. Kristoffersen, and T. A. Whittingham, "Which transducer array is best," Eur. J. Ultrasound, vol. 2, pp. 151-164, 1995.
3. K. A. Snook, T. R. Shrout, and K. K. Shung, "Development of high frequency annular arrays for medical imaging," in Proc. IEEE Ultrason. Symp., 2003, pp. 865-868.
4. W. Ehrfeld, "The LIGA process for microsystems," Microsyst. Technol., vol. 90, pp. 521-528, 1990.
5. A. Rogner, J. Eicher, D. Munchmeyer, R. P. Peters, and J. Mohr, "The LIGA technique - What are the new opportunities," J. Micromech. Microeng., vol. 3, pp. 133-140, 1992.
6. Y. Hirata, H. Nakaishi, T. Numazawa, and H. Takada, "Piezocomposite of fine PZT rods with synchrotron radiation lithography," in Proc. IEEE Ultrason. Symp., 1997, pp. 877-881.
7. S. N. Wang, J.-F. Li, R. Toda, R. Watanabe, K. Minami, and M. Esashi, "Novel processing of high aspect ratio 1-3 structures of high density PZT," in Proc. IEEE 11th Annu. Int. Workshop Micro Electro Mechan. Syst., 1998, pp. 223-228.
8. J. Sato, M. Kawabuchi, and A. Fukumoto, "Width to thickness ratio for elements in electronically scanned ultrasound diagnostic system," J. Acoust. Soc. Amer., vol. 66, pp. 1609-1611, 1979.
9. M. Lukac, M. Sayer, G. Lockwood, and F. S. Foster, "Laser micromachined high frequency ultrasonic arrays," in Proc. IEEE Ultrason. Symp., 1999, pp. 1209-1212.
10. T. R. Ritter, T. R. Shrout, R. Tutwiler, and K. K. Shung, "A 30 MHz piezo-composite ultrasound array for medical imaging applications," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 49, pp. 213-230, 2002.
11. J. M. Cannata, Q. F. Zhou, and K. K. Shung, "Development of a high frequency (35 MHz) linear ultrasonic array using 2-2 composite elements," in Proc. IEEE Ultrason. Symp., 2004, pp. 894-897.
12. R. Liu, K. A. Harasiewicz, and F. S. Foster, "Interdigital pair bonding for high frequency (20-50 MHz) ultrasonic composite transducers," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 48, pp. 299-306, 2001.
13. M. Sayer, "Piezoelectric films and coatings," Can. Ceram. Quart. J. Can. Ceram. Soc., vol. 65, pp. 180-182, Aug. 1996.
14. G. Yi and M. Sayer, "Sol gel processing of complex oxide films," J. Amer. Ceram. Soc. Bull., vol. 70, pp. 1173-1179, 1991.
15. K. Y. Lee, N. LaBianca, S. A. Rishton, S. Zolgharnain, J. D. Gelorme, J. Shaw, and T. H. P. Chang, "Micromachining applications of a high resolution ultrathick photoresist," J. Vac. Sci. Technol. B, vol. 13, pp. 3012-3016, 1995.
16. H. Lorenz, M. Despont, P. Vettiger, and P. Renaud, "Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist," Microsyst. Technol., vol. 4, pp. 143-146, 1998.
17. J. H. Daniel, B. Krusor, R. B. Apte, M. Mulato, K. Van Schuylenbergh, R. Lau, T. Do, R. A. Street, A. Goredema, D. C. Boils-Boissier, and P. M. Kazmaier, "Micro-electro-mechanical system fabrication technology applied to large area X-ray image sensor arrays," J. Vac. Sci. Technol. A, vol. 19, pp. 1219-1223, Jul./Aug. 2001.
18. M. Sayer, G. R. Lockwood, T. R. Olding, G. Pang, M. Cohen, W. Ren, and B. K. Mukherjee, "Macroscopic actuators using thick piezoelectric coatings," in Proc. Mater. Res. Soc. Symp., 2001.