Effect of He addition on the heating characteristics of substrate surface irradiated by Ar thermal plasma jet

Thin Solid Films

Volumn 516, Issue 11, 2008, Pages 3680-3683

  Okada, T ^a   Higashi, S ^a   Kaku, H ^a   Koba, N ^a   Murakami, H ^a   Miyazaki, S ^a  

^a HIROSHIMA UNIVERSITY   (Japan)

Author keywords

Rapid thermal annealing; Thermal pinch effect; Thermal plasma jet

Indexed keywords

ARGON; HEATING; PINCH EFFECT; RAPID THERMAL ANNEALING; TEMPERATURE MEASUREMENT;

POWER DENSITY; SURFACE TEMPERATURE; THERMAL PINCH EFFECTS; THERMAL PLASMA JET;

HELIUM;

EID: 40649127248     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.08.090     Document Type: Article

References (6)

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2. Okada T., Higashi S., Koba N., Kaku H., Murakami H., and Miyazaki S. Thin Solid Films 515 (2007) 4897
3. Okada T., Higashi S., Kaku H., Koba N., Murakami H., and Miyazaki S. Jpn. J. Appl. Phys. 45 (2006) 4355
4. Higashi S., Kaku H., Murakami H., Miyazaki S., Watakabe H., Ando N., and Sameshima T. Jpn. J. Appl. Phys. 44 (2005) 108
5. Vargaftik N.B. Handbook of Physical Properties of Liquids and Gases (1983), Hemisphere Pub. Corp., Washington
6. Boulos M.I., Fauchais P., and Pfender E. Thermal Plasmas (1994), Plenum Pub. Corp., New York