Recognition of semiconductor defect patterns using spectral clustering

IEEM 2007: 2007 IEEE International Conference on Industrial Engineering and Engineering Management

Volumn , Issue , 2007, Pages 587-591

  Wang, Chih Hsuan ^a  

^a MING CHUAN UNIVERSITY   (Taiwan)

Author keywords

Data mining; Defect pattern; Fuzzy clustering; Spectral clustering

Indexed keywords

DATA MINING; DEFECTS; FUZZY CLUSTERING; PROBLEM SOLVING;

DEFECT PATTERN; SPECTRAL CLUSTERING;

PATTERN RECOGNITION;

EID: 40649114008     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEEM.2007.4419257     Document Type: Conference Paper

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