DC bias-dependent shift of the resonance frequencies in BST thin film membranes

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 54, Issue 12, 2007, Pages 2487-2491

  Noeth, Andreas ^b   Yamada, Tomoaki ^b   Sherman, Vladimir O ^b   Muralt, Paul ^b   Tagantsev, Alexander K ^b   Setter, Nava ^a,b  

^a IEEE

^b EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; CAPACITORS; ELECTROMECHANICAL COUPLING; FREE ENERGY; MICROMACHINING;

ANTIRESONANCE FREQUENCY; PIEZOACTIVE LAYERS; RESONANCE FREQUENCY; THIN FILM CAPACITORS; TUNABILITY;

THIN FILMS;

ACOUSTICS; ARTICLE; ARTIFICIAL MEMBRANE; CERAMICS; CHEMISTRY; ELECTROCHEMISTRY; ELECTROMAGNETIC FIELD; EQUIPMENT; EQUIPMENT DESIGN; IMPEDANCE; INSTRUMENTATION; MATERIALS TESTING; METHODOLOGY; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; TRANSDUCER;

ACOUSTICS; CERAMICS; ELECTRIC IMPEDANCE; ELECTROCHEMISTRY; ELECTROMAGNETIC FIELDS; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MATERIALS TESTING; MEMBRANES, ARTIFICIAL; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; TRANSDUCERS;

EID: 40649089070     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2007.565     Document Type: Conference Paper

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