Advances in semiconductor wafer fabrication scheduling based on genetic algorithm

Tongji Daxue Xuebao/Journal of Tongji University

Volumn 36, Issue 1, 2008, Pages 97-102

  Cao, Zhengcai ^a   Wu, Qidi ^a   Qiao, Fei ^a   Wang, Zuntong ^a  

^a TONGJI UNIVERSITY   (China)

Author keywords

Genetic algorithm; Scheduling; Semiconductor wafer fabrication

Indexed keywords

FABRICATION; MANUFACTURE; SCHEDULING;

COMPUTATIONAL INTELLIGENCE; PARAMETER CHOICE; SEMICONDUCTOR WAFER FABRICATION;

GENETIC ALGORITHMS;

EID: 40449114480     PISSN: 0253374X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (32)

1. Kim Y D, Shim S O, Choi B, et al. Simplification methods for accelerating simulation-based real-time scheduling in a semiconductor wafer fabrication facility[J]. IEEE Transactions on Semiconductor Manufacturing, 2003, 16(2): 290.
2. Hsieh B W, Chen C H, Chang S C. Scheduling semiconductor wafer fabrication by using ordinal optimization-based simulation[J]. IEEE Transactions on Robotics and Automation, 2001, 17(5): 599.
3. Hwang T K, Chang S C. Design of a lagrangian relaxation-based hierarchical production scheduling environment for semiconductor wafer fabrication[J]. IEEE Transactions on Robotics and Automation, 2003, 19(4): 566.
4. Kumar P R. Re-entrant lines[J]. Special Issue on Queuing Networks, 1993, 13(1): 87.
5. Shen Y X, Leachman R C. Stochastic wafer fabrication scheduling[J]. IEEE Transactions on Semiconductor Manufacturing, 2003, 16(1): 2.
6. Chiang T C, Huang A C, Fu L C. Modeling, scheduling, and performance evaluation for wafer fabrication: a queueing colored Petri-net and GA-based approach[J]. IEEE Transactions on Automation Science and Engineering, 2006, 3(3): 330.
7. WANG Ling, ZHENG Dazhong. Meta-heuristic algorithms: a review[J]. Control and Decision, 2000, 15(3): 257.
8. WANG Ling, ZHENG Dazhong. Advances in job shop scheduling based on genetic algorithm[J]. Control and Decision, 2001, 16(Suppl): 641.
9. LI Haizhen. Research on MAS based dynamic scheduling for semiconductor wafer fabrication[D]. Shanghai: Tongji University. School of Electronics and Information Engineering, 2005.
10. FENG Bizheng. Research on scheduling approach for semiconductor wafer fab based on genetic algorithm[D]. Shanghai: Tongji University. School of Electronics and Information Engineering, 2005.
11. WANG Ling. Shop scheduling with genetic algorithms[M]. Beijing: Tsinghua University Press, 2003.
12. Cheng R W, Gen M, Tsujimura Y. A tutorial survey of job-shop scheduling problems using genetic algorithms[J]. Comp Ind Eng, 1996, 30(4): 983.
13. Cavalieri S, Crisafulli F, Mirabella O. Genetic algorithm for job-shop scheduling in a semiconductor manufacturing systcm[C]//The 25th Annual Conference on Industrial Electronics Society. Los Alamitos: Institute of Electrical and Electronics Engineers Computer Society, 1999, 2: 957-961.
14. Chen J H, Fu L C, Lin M H. Petri-net and GA based approach to modeling, scheduling, and performance evaluation for wafer fabrication[C]//IEEE International Conference on Robotics and Automation. San Francisco: Institute of Electrical and Electronics Engineers Inc, 2000, 4: 3403-3408.
15. Davis L. Handbook of genetic algorithms[M]. New York: Van Nostrand Reinhold, 2000.
16. Grefenstette J J. Optimization of control parameters for genetic algorithms[J]. IEEE Transaction on System, Man and Cybern, 1986, 16(1): 122.
17. Srinivas M, Patnaik L M. Adaptive probabilities of crossover and mutation in genetic algorithms[J]. IEEE Transaction on System, Man and Cybernetics, 1994, 24(4): 656.
18. WANG Ling, ZHENG Dazhong. A kind of GASA hybrid optimization strategy[J]. Control Theory and Applications, 2001, 18(4): 552.
19. Xiong H H, Zhou M C. Scheduling of semiconductor test facility via Petri nets and hybrid heuristic search[J]. IEEE Transaction on Semiconductor Manufacturing, 1998, 11(3): 384.
20. HUANG Minmei, LUO Ronggui, YUAN Jijun. An improved hybrid genetic algorithm for permutation flowshop scheduling[J]. China Mechanical Engineering, 2006, 17(16): 1707.
21. YANG Jianjun, LIU Yang, WEI Lixin, et al. Dual coding hybrid genetic algorithm for optimal schedule of pumping stations in multi-sources water injection system[J]. Acta Automatica Sinica, 2006, 32(1): 154.
22. Kolonko M. Some new results on simulated annealing applied to the job shop scheduling problem[J]. Eur J Oper Res, 1999, 113(1): 123.
23. Cheng R W, Gen M, Tsujimura Y. A tutorial survey of scheduling problems using genetic algorithms: hybrid genetic search strategies[J]. Comp Ind Eng, 1999, 36(2): 341.
24. Mahfoud S W, Goldberg D E. Parallel recombinative simulated annealing: a genetic algorithm[J]. Parallel Computing, 2003, 21: 1.
25. Huntley C L, Brown D E. Parallel genetic algorithms with search[J]. Computers Ops Res, 2003, 23(6): 559.
26. Poths J C, Giddens T D, Yadaw S B. The development and evaluation for an improved genetic algorithms based on migration and artificial selection[J]. IEEE Transaction on System, Man and Cybern, 2001, 31(1): 73.
27. YANG Honghong. Application of genetic algorithm in production planning and scheduling optimization of manufacturing system[D]. Shanghai: Shanghai Jiaotong University. School of Electronic, Information and Electrical Engineering, 2002.
28. LU Wenyan, DANG Yanzhong. Scheduling re-entrant lines based on GA and integrated rules[J]. Acta Simulata Systematica Sinica, 2005, 17(4): 993.
29. Chen H N, Dabbas R. Modeling staffing requirements within a semiconductor manufacturing environment[C]//IEEE Conference and Workshop on Advanced Semiconductor Manufacturing. Boston: Institute of Electrical and Electronics Engineers Inc, 2002: 234-239.
30. Wen H W, Fu L C, Huang S S. Modeling, scheduling, and prediction in wafer fabrication systems using queueing Petri net and genetic algorithm[C]//IEEE International Conference on Robotics and Automation. Seoul: Institute of Electrical and Electronics Engineers Inc, 2001, 4: 3559-3564.
31. Moro A R, Yu H, Kelleher G. Hybrid heuristic search for the scheduling of flexible manufacturing systems using Petri nets[J]. IEEE Transaction on Robotics and Automation, 2002, 18(2): 240.
32. Chen J H, Fu L C, Lin M H, et al. Petri-net and GA-based approach to modeling, scheduling, and performance evaluation for water fabrication[J]. IEEE Transaction on Robotics and Automation, 2001, 17(5): 619.