Stochastic wafer fabrication scheduling

IEEE Transactions on Semiconductor Manufacturing

Volumn 16, Issue 1, 2003, Pages 2-13

  Shen, Youxun ^a   Leachman, Robert C ^b  

^a AGILENT TECHNOLOGIES   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Fab scheduling; Linear quadratic control; Stochastic dynamic programming; Uncertainty analysis

Indexed keywords

DYNAMIC PROGRAMMING; HEURISTIC METHODS; LINEAR CONTROL SYSTEMS; MATHEMATICAL MODELS; PRODUCTION CONTROL; RANDOM PROCESSES; ROBUSTNESS (CONTROL SYSTEMS); SILICON WAFERS; UNCERTAIN SYSTEMS;

LINEAR QUADRATIC CONTROL; OPTIMAL SCHEDULING POLICY; STOCHASTIC DYNAMIC PROGRAMMING MODEL; STOCHASTIC LINEAR QUADRATIC CONTROL; WAFER FABRICATION SCHEDULING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0037328468     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2002.807743     Document Type: Article

References (27)

1. R. Akella, S. Rajagopalan, and M. R. Singh, "Part dispatching in random yield multistage flexible test systems for printed circuit boards," Oper. Res., vol. 40, no. 4, pp. 776-798, July-Aug. 1992.
2. R. N. Anthony, Planning and Control Systems: A Framework for Analysis. Cambridge, MA: Harvard Univ. Press, 1965.
3. S. X. Bai and S. B. Gershwin, "Scheduling manufacturing systems with work-in-process inventory control: Reentrant systems," OR Spektrum, vol. 18, no. 4, pp. 187-195, 1996.
4. D. P. Bertsekas, Dynamic Programming: Deterministic and Stochastic Models. Englewood Cliffs, NJ: Prentice Hall, 1987.
5. T. Chitchachornvanich, "Optimizing semiconductor fab scheduling in the face of uncertainties," Ph.D. dissertation, Univ. of California, Berkeley, 1998.
6. L. Demeester and C. S. Tang, "Reducing cycle time at an IBM wafer fabrication facility," Interfaces, vol. 26, no. 2, pp. 34-49, Mar.-Apr. 1996.
7. E. V. Denardo and Y. S. Lee, "Managing uncertainty in a serial production line," Oper. Res., vol. 44, no. 2, pp. 382-392, Mar.-Apr. 1994.
8. C. R. Glassey and M. G. C. Resende, "Closed-loop job release control for VLSI circuit manufacturing," IEEE Trans. Semiconduct. Manuf., vol. 1, pp. 36-46, February 1988.
9. E. M. Goldratt and J. Cox, Eds., The Goal: Excellence in Manufacturing. Great Barrington, MA: North River, 1984.
10. L. Gong and H. Matsuo, "Stabilizing work-in-process and smoothing production in a production system with random yield," in Working Paper, 1990.
11. ____, "A control policy for a manufacturing system with random yield and rework," in Working Paper, 1990.
12. S. C. Graves, "Safety stocks in manufacturing systems," J. Manuf. Oper. Manage., vol. 1, no. 1, pp. 478-495, 1989.
13. S. T. Hackman and R. C. Leachman, "A general framework for modeling production," Manage. Sci., vol. 35, no. 4, pp. 478-495, 1989.
14. R. C. Leachman, "Modeling techniques for automated production planning the semiconductor industry," in Optimization in Industry, T. Ciriani and R. C. Leachman, Eds. Sussex, U.K.: Wiley, 1993.
15. ____, Lecture Notes on Methods of Manufacturing Improvement. Berkeley: Univ. California, 1997.
16. R. C. Leachman, R. Benson, C. Liu, and D. Raar, "IMPReSS: An automated production planning and delivery quotation system at Harris corporation - Semiconductor sector," Interfaces, vol. 27, no. 1, pp. 6-37, Jan.-Feb. 1996.
17. S. X. C. Lou and P. W. Kager, "A robust production control policy for VLSI wafer fabrication," IEEE Trans. Semiconduct. Manuf., vol. 2, no. 4, pp. 159-164, Nov. 1989.
18. C. H. Lu, D. Ramaswamy, and P. R. Kumar, "Efficient scheduling policies to reduce mean and variance of cycle-time in semiconductor manufacturing plants," IEEE Trans. Semiconduct. Manuf., vol. 7, pp. 374-388, Aug. 1994.
19. J. D. Plummer, M. D. Deal, and P. B. Grittin, Silicon VLSI Technology. Englewood Cliffs, NJ: Prentice Hall, 2000.
20. G. van Ryzin, S. Lou, and S. B. Gershwin, "Production control for a tandem two-machine system," IIE Trans., vol. 25, no. 5, pp. 5-20, Sept. 1993.
21. Y. Shen, "Stochastic wafer fabrication scheduling," Ph.D., Univ. California, Berkeley, 1997.
22. Y. Shen and R. Leachman, "User Manual - SLQ-Based Fab Scheduler, Res. Rep.," Semiconductor Research Corp., 1998.
23. N. Srivatsan and K. Kempf, "Production control in a re-entrant line: A continuous optimization model," Intel Wroking Paper, 1997.
24. C. S. tang, "The impact of uncertainty on a production line," Manage. Sci., vol. 36, no. 12, pp. 1518-1531, Dec. 1990.
25. L. M. Wein, "Scheduling semiconductor wafer fabrication," IEEE Trans. Semiconduct. Manuf., vol. 1, pp. 115-130, Aug. 1988.
26. H. Yan, S. Lou, S. P. Sethi, A. Garddel, and P. Deosthali, "Testing the robustness of two-boundary control policies in semiconductor manufacturing," IEEE Trans. Semiconduct. Manuf., vol. 9, pp. 285-288, May 1996.
27. C. A. Yano and H. L. Lee, "Lot sizing with random yield: A review," Oper. Res., vol. 43, no. 2, pp. 331-334, Mar.-Apr. 1995.