Study of a micro chamber quadrupole mass spectrometer

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 26, Issue 2, 2008, Pages 239-243

  Wang, Jinchan ^a   Zhang, Xiaobing ^a   Mao, Fuming ^a   Xiao, Mei ^a   Cui, Yunkang ^a   Den Engelsen, Daniel ^a   Lei, Wei ^a  

^a SOUTHEAST UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; ELECTRON DEVICES; FARADAY EFFECT; ION SOURCES; PARTIAL PRESSURE;

BAKING PROCESS; QUADRUPOLE MASS FILTER; RESIDUAL GAS ANALYSES; THIN METAL LAYER;

MASS SPECTROMETERS;

EID: 40249084382     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2827512     Document Type: Article

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