Spectroscopic study of microwave-enhanced silicon exfoliation

Applied Physics Letters

Volumn 92, Issue 8, 2008, Pages

  Thompson, D C ^a   Alford, T L ^a   Mayer, J W ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; INFRARED SPECTROSCOPY; MICROWAVE SPECTROSCOPY; OPTIMIZATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPECTROMETRY;

EXFOLIATION; RUTHERFORD BACKSCATTERING SPECTROMETRY;

SILICON;

EID: 40049107741     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2842420     Document Type: Article

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