Color filter incorporating a subwavelength patterned grating in poly silicon

Optics Express

Volumn 16, Issue 4, 2008, Pages 2374-2380

  Yoon, Yeo Taek ^a   Lee, Hong Shik ^a   Lee, Sang Shin ^a   Kim, Sang Hoon ^b   Park, Joo Do ^b   Lee, Ki Dong ^b  

^a Kwangwoon University   (South Korea)

^b LG Electronics Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; PHOTOLITHOGRAPHY; POLYSILICON; QUARTZ;

COLOR FILTERS; LASER INTERFERENCE LITHOGRAPHY;

OPTICAL FILTERS;

EID: 39749151092     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.16.002374     Document Type: Article

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