Angle-resolved three-dimensional analysis of surface films by coherence scanning interferometry

Optics Letters

Volumn 32, Issue 12, 2007, Pages 1638-1640

  De Groot, Peter ^a   De Lega, Xavier Colonna ^a  

^a ZYGO CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FOURIER ANALYSIS; SCANNING; SIGNAL INTERFERENCE; SURFACE TOPOGRAPHY;

3D TOPOGRAPHY; ANGLES OF INCIDENCE; COHERENCE SCANNING INTERFEROMETRY; THIN-FILM LAYERS;

THIN FILMS;

EID: 39749121551     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.32.001638     Document Type: Article

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