Modeling and optimization of a microscale capacitive humidity sensor for HVAC applications

IEEE Sensors Journal

Volumn 8, Issue 4, 2008, Pages 333-340

  Sen, Ashis Kumar ^b   Darabi, Jeff ^a,b  

^a IEEE

^b University of South Carolina   (United States)

Author keywords

Capacitive humidity sensor; Interdigitated electrode configuration; Numerical modeling; Parallel plate electrode configuration; Polyimide

Indexed keywords

ATMOSPHERIC HUMIDITY; ELECTRODES; HUMIDITY SENSORS; POLYIMIDES; VENTILATION;

CAPACITIVE HUMIDITY SENSOR; INTERDIGITATED ELECTRODE CONFIGURATION; PARALLEL PLATE ELECTRODE CONFIGURATION;

AIR CONDITIONING;

EID: 39749119826     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2008.917479     Document Type: Article

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