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Volumn 8, Issue 4, 2008, Pages 333-340

Modeling and optimization of a microscale capacitive humidity sensor for HVAC applications

Author keywords

Capacitive humidity sensor; Interdigitated electrode configuration; Numerical modeling; Parallel plate electrode configuration; Polyimide

Indexed keywords

ATMOSPHERIC HUMIDITY; ELECTRODES; HUMIDITY SENSORS; POLYIMIDES; VENTILATION;

EID: 39749119826     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2008.917479     Document Type: Article
Times cited : (24)

References (15)
  • 2
    • 2342513438 scopus 로고    scopus 로고
    • Relative humidity sensors using porous SiC membranes and Al electrodes
    • E. J. Connolly, H. T. M. Pham, J. Groeneweg, P. M. Sarro, and P. J. French, "Relative humidity sensors using porous SiC membranes and Al electrodes." Sens. Actuators B, vol. 100, no. 1-2, pp. 216-220, 2004.
    • (2004) Sens. Actuators B , vol.100 , Issue.1-2 , pp. 216-220
    • Connolly, E.J.1    Pham, H.T.M.2    Groeneweg, J.3    Sarro, P.M.4    French, P.J.5
  • 3
    • 2342620675 scopus 로고    scopus 로고
    • A novel capacitive-type humidity sensor using CMOS fabrication technology
    • L. Gu, Q. Huang, and M. Qin, "A novel capacitive-type humidity sensor using CMOS fabrication technology," Sens. Actuators B, vol. 99, pp. 491-498, 2004.
    • (2004) Sens. Actuators B , vol.99 , pp. 491-498
    • Gu, L.1    Huang, Q.2    Qin, M.3
  • 4
    • 1542301696 scopus 로고    scopus 로고
    • Improvement of polyimide capacitive humidity sensor by reactive ion etching and novel electrode design
    • Y. L. Yang, L. H. Lo, I. Y. Huang, H. J. H. Chen, J. H. Huang, and S. R. S. Huang, "Improvement of polyimide capacitive humidity sensor by reactive ion etching and novel electrode design," Proc. IEEE Sensors, vol. 1, no. 1, pp. 511-514, 2002.
    • (2002) Proc. IEEE Sensors , vol.1 , Issue.1 , pp. 511-514
    • Yang, Y.L.1    Lo, L.H.2    Huang, I.Y.3    Chen, H.J.H.4    Huang, J.H.5    Huang, S.R.S.6
  • 5
    • 0026173423 scopus 로고
    • Capacitive-type humidity sensor using cross-linked poly (methylmethacrylate) thin films
    • M. Matsuguchi, Y. Sadaoka, Y. Sakai, T. Kuroiwa, and A. Ito, "Capacitive-type humidity sensor using cross-linked poly (methylmethacrylate) thin films," J. Electrochem. Soc., vol. 138, no. 6, pp. 1862-1865, 1991.
    • (1991) J. Electrochem. Soc , vol.138 , Issue.6 , pp. 1862-1865
    • Matsuguchi, M.1    Sadaoka, Y.2    Sakai, Y.3    Kuroiwa, T.4    Ito, A.5
  • 6
    • 0033886159 scopus 로고    scopus 로고
    • High-speed capacitive humidity sensor with on-chip thermal reset
    • U. Kang and K. D. Wise, "High-speed capacitive humidity sensor with on-chip thermal reset," IEEE Trans. Electron Devices, vol. 47, no. 4, pp. 702-710, 2000.
    • (2000) IEEE Trans. Electron Devices , vol.47 , Issue.4 , pp. 702-710
    • Kang, U.1    Wise, K.D.2
  • 8
    • 0029292053 scopus 로고    scopus 로고
    • T. Kuroiwa, T. Miyagishi, A. Ito, M. Matsuguchi, Y., and Y. Sakai, Thin-film polysulfone-based capacitive-type relative-humidity sensor, Sens. Actuators B. B25, no. 1-3, pt. 2, pp. 692-695, 1995.
    • T. Kuroiwa, T. Miyagishi, A. Ito, M. Matsuguchi, Y., and Y. Sakai, "Thin-film polysulfone-based capacitive-type relative-humidity sensor," Sens. Actuators B. vol. B25, no. 1-3, pt. 2, pp. 692-695, 1995.
  • 9
    • 0035770595 scopus 로고    scopus 로고
    • A capacitive humidity sensor in CMOS technology
    • X. Yan. M. Qin, and Q. Huang, "A capacitive humidity sensor in CMOS technology," Proc. SPIE Int. Soc. Opt. Eng., vol. 4601, pp. 43-47, 2001.
    • (2001) Proc. SPIE Int. Soc. Opt. Eng , vol.4601 , pp. 43-47
    • Yan, X.1    Qin, M.2    Huang, Q.3
  • 11
    • 0022091835 scopus 로고
    • Polyimide-based capacitive humidity sensor
    • P. J. Schubert and J. H. Nevin, "Polyimide-based capacitive humidity sensor," IEEE Trans. Electron Devices, vol. ED32, no. 7, pp. 1220-1223, 1985.
    • (1985) IEEE Trans. Electron Devices , vol.ED32 , Issue.7 , pp. 1220-1223
    • Schubert, P.J.1    Nevin, J.H.2
  • 12
    • 0030126887 scopus 로고    scopus 로고
    • A digital hygrometer using a polyimide film relative humidity sensor
    • H. Shibata, M. Ito, M. Asakursa, and K. Waltanabe, "A digital hygrometer using a polyimide film relative humidity sensor," IEEE Trans. Instrum. Meas., vol. 45, no. 2, pp. 564-569, 1996.
    • (1996) IEEE Trans. Instrum. Meas , vol.45 , Issue.2 , pp. 564-569
    • Shibata, H.1    Ito, M.2    Asakursa, M.3    Waltanabe, K.4
  • 13
    • 33748026777 scopus 로고    scopus 로고
    • Micromachined water vapor sensors: A review of sensing technologies
    • R. Fenner and E. Zdankiewicz, "Micromachined water vapor sensors: A review of sensing technologies." IEEE Sensors J., vol. 1, no. 4, pp. 309-317, 2001.
    • (2001) IEEE Sensors J , vol.1 , Issue.4 , pp. 309-317
    • Fenner, R.1    Zdankiewicz, E.2
  • 14
    • 0141830175 scopus 로고    scopus 로고
    • Micro-machine based humidity sensors with integrated temperature sensors for signal drift compensation
    • C. Lee and G. Lee, "Micro-machine based humidity sensors with integrated temperature sensors for signal drift compensation," J. Micromech. Microeng, vol. 13, pp. 620-627, 2003.
    • (2003) J. Micromech. Microeng , vol.13 , pp. 620-627
    • Lee, C.1    Lee, G.2
  • 15
    • 19944371183 scopus 로고    scopus 로고
    • Integrating humidity sensor based on a polybutadiene-MgSO4 composite
    • J. W. Fergus and T. Hsu, "Integrating humidity sensor based on a polybutadiene-MgSO4 composite," Meas. Sci. Technol, vol. 16, pp. 1255-1260, 2005.
    • (2005) Meas. Sci. Technol , vol.16 , pp. 1255-1260
    • Fergus, J.W.1    Hsu, T.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.