Stress evolution in Mo/Si multilayers for high-reflectivity extreme ultraviolet mirrors

Applied Physics Letters

Volumn 73, Issue 1, 1998, Pages 43-45

  Freitag, J M ^a   Clemens, B M ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002483569     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121717     Document Type: Article

References (11)

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