Thermal stability of semiconducting thin germanium/carbon alloy films produced from tetraethylgermanium in an RF glow discharge

Thin Solid Films

Volumn 352, Issue 1-2, 1999, Pages 6-8

  Gazicki, M ^a   Janowska, G ^a  

^a LODZ UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Carbon; Germanium; Glow discharge; Organometallic vapour deposition

Indexed keywords

EID: 0347031712     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00374-0     Document Type: Article

References (11)

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