Improvement in ferroelectric properties of PZT thick films prepared by a modified sol-gel technique using low temperature laser annealing

Physica Scripta T

Volumn T129, Issue , 2007, Pages 175-179

  Tsai, Shen Da ^a   Suresh, M B ^a   Chou, Chen Chia ^a  

^a NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; LASER BEAMS; LEAD COMPOUNDS; LOW TEMPERATURE EFFECTS; SOL-GEL PROCESS; SPIN COATING;

LASER ANNEALING; POWDER MIXING; SOL GEL SPIN COATING;

THICK FILMS;

EID: 39549121045     PISSN: 02811847     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1088/0031-8949/2007/T129/040     Document Type: Conference Paper

References (19)

1. Scott J F and de Araujo C A P 1989 Science 246 1400
2. Muralt P 2000 J. Micromech. Microeng. 10 136
3. Polla D L and Francis L F 1996 Mater. Res. Bull. 21 59
4. De Paula R P and Moore E L 1984 Fiber Optic Laser Sensors II vol 478 (Bellingham, WA: SPIE Optical Engineering Press, SPIE)
5. Pavin C J, Sherar M D and Foster S 1990 Opthamology 97 244
6. Tu Y L and Milne S J 1996 J. Mater. Res. 11 2556
7. Barrow D A, Petroff T E, Tandon R P and Sayer M 1997 J. Appl. Phys. 81 2556
8. Kurchania R and Milne S J 1999 J. Mater. Res. 14 1852
9. Yasuda Y, Akamatsu M, Tani M, Yoshida M, Kondo K and Iijima T 2001 Japan J. Appl. Phys. 40 5518
10. Tsurumi T, Ozawa S, Abe G, Ohashi N, Wada S and Yamane M 2000 Japan J. Appl. Phys. 39 5604
11. Wang Z, Zhu W, Zhao C and Tan O K 2003 Mater. Sci. Eng. B 99 56
12. Calzada M L, Bretos I, Jimenez R, Guillon H and Pardo L 2004 Adv. Mater. 16 18
13. Ohno T, Kunieda M, Suzuki H and Hayashi T 2000 Japan J. Appl. Phys. 39 5429
14. Lai S C, Lue H T, Hsieh K Y, Lung S L, Liu R, Wu T B, Donohue P P and Rumsby P 2004 J. Appl. Phys. 96 2779
15. Pan H C, Chou C C and Tsai H L 2003 Appl. Phys. Lett. 83 3156
16. Chou C F, Pan H C and Chou C C 2002 Japan J. Appl. Phys. 41 6679
17. Pan H C, Tsai H L and Chou C C 2002 Int. Ferroelectr. 46 163
18. Weiguang Z, Zhihong W, Changlei Z, Ooi K T and Huey H H 2002 Japan J. Appl. Phys. 41 6969
19. Fukami T and Fuju S 1985 Japan J. Appl. Phys. 24 632