Evanescent wave interference lithography for surface nano-structuring

Physica Scripta T

Volumn T129, Issue , 2007, Pages 35-37

  Zhou, Y ^a   Hong, M H ^a,b   Fuh, J Y H ^a   Lu, L ^a   Lukiyanchuk, B S ^b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b DATA STORAGE INSTITUTE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

LASERS; LITHOGRAPHY; NANOSTRUCTURED MATERIALS;

ENERGY DISTRIBUTION; EVANESCENT WAVE INTERFERENCE LITHOGRAPHY; INTERFERENCE PATTERNS; LLOYD'S MIRROR; SURFACE NANOSTRUCTURING;

SURFACE STRUCTURE;

EID: 39549102823     PISSN: 02811847     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1088/0031-8949/2007/T129/008     Document Type: Conference Paper

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