An alternatively efficient method (DBEM) for simulating the electrostatic field and levitating force of a MEMS combdrive

Journal of Micromechanics and Microengineering

Volumn 14, Issue 8, 2004, Pages 1258-1269

  Liao, Yunn Shiuan ^a   Chyuan, Shiang Woei ^a   Chen, Jeng Tzong ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN OCEAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY ELEMENT METHOD; COMPUTER SIMULATION; ELECTRIC FIELDS; ELECTROSTATICS; FINITE ELEMENT METHOD; MAGNETIC LEVITATION; MATHEMATICAL MODELS;

COMB-DRIVES; DRIVING FORCE; LEVITATING FORCE; MESH;

MICROELECTROMECHANICAL DEVICES;

EID: 3943109055     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/8/020     Document Type: Article

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